Principles and Fabrication of Thermopile

碩士 === 國立交通大學 === 光電(科學)研究所 === 83 === We are using the standard MOS process and anisotropic etching technology to fabricate a floating-membrane, which is high thermal resistance. The thermoelectric materials are polysilicon and aluminum....

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Bibliographic Details
Main Authors:	Po-Wei Hwang, 黃柏蔚
Other Authors:	Jin-Shown Shie
Format:	Others
Language:	zh-TW
Published:	1995
Online Access:	http://ndltd.ncl.edu.tw/handle/41244063476487017867

id	ndltd-TW-083NCTU0123024
record_format	oai_dc
spelling	ndltd-TW-083NCTU01230242015-10-13T12:53:37Z http://ndltd.ncl.edu.tw/handle/41244063476487017867 Principles and Fabrication of Thermopile 熱電堆原理分析與製程探討 Po-Wei Hwang 黃柏蔚碩士國立交通大學光電(科學)研究所 83 We are using the standard MOS process and anisotropic etching technology to fabricate a floating-membrane, which is high thermal resistance. The thermoelectric materials are polysilicon and aluminum. It is a spidery structure. The investigation on thermoelectric effect analysis, calculation of P,N type silicon seebeck voltage and structure design wewe performed. During floating-membrane forming, the thermal stress, which could be compensated by sandwitch structure (Nitride/Oxide /Nitride). To measure stress and enhance structure is the goal of future fabrication. Jin-Shown Shie 謝正雄 1995 學位論文 ; thesis 43 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立交通大學 === 光電(科學)研究所 === 83 === We are using the standard MOS process and anisotropic etching technology to fabricate a floating-membrane, which is high thermal resistance. The thermoelectric materials are polysilicon and aluminum. It is a spidery structure. The investigation on thermoelectric effect analysis, calculation of P,N type silicon seebeck voltage and structure design wewe performed. During floating-membrane forming, the thermal stress, which could be compensated by sandwitch structure (Nitride/Oxide /Nitride). To measure stress and enhance structure is the goal of future fabrication.
author2	Jin-Shown Shie
author_facet	Jin-Shown Shie Po-Wei Hwang 黃柏蔚
author	Po-Wei Hwang 黃柏蔚
spellingShingle	Po-Wei Hwang 黃柏蔚 Principles and Fabrication of Thermopile
author_sort	Po-Wei Hwang
title	Principles and Fabrication of Thermopile
title_short	Principles and Fabrication of Thermopile
title_full	Principles and Fabrication of Thermopile
title_fullStr	Principles and Fabrication of Thermopile
title_full_unstemmed	Principles and Fabrication of Thermopile
title_sort	principles and fabrication of thermopile
publishDate	1995
url	http://ndltd.ncl.edu.tw/handle/41244063476487017867
work_keys_str_mv	AT poweihwang principlesandfabricationofthermopile AT huángbǎiwèi principlesandfabricationofthermopile AT poweihwang rèdiànduīyuánlǐfēnxīyǔzhìchéngtàntǎo AT huángbǎiwèi rèdiànduīyuánlǐfēnxīyǔzhìchéngtàntǎo
_version_	1716868604544155648

Principles and Fabrication of Thermopile

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