Principles and Fabrication of Thermopile
碩士 === 國立交通大學 === 光電(科學)研究所 === 83 === We are using the standard MOS process and anisotropic etching technology to fabricate a floating-membrane, which is high thermal resistance. The thermoelectric materials are polysilicon and aluminum....
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1995
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/41244063476487017867 |