PSA Simple Ellipsometer

碩士 === 國立交通大學 === 光電(科學)研究所 === 83 === A PSA photometric ellipsometer is introduced to measure the ellipsometric parameters psi and delta of a sample. If the field of the parallel(p) and perpendicular(s) to the plane of incident are equal, the change of t...

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Bibliographic Details
Main Authors: Lee Wun-Chih, 李文智
Other Authors: Y.F. Chao
Format: Others
Language:zh-TW
Published: 1995
Online Access:http://ndltd.ncl.edu.tw/handle/42199536277152284302