PSA Simple Ellipsometer
碩士 === 國立交通大學 === 光電(科學)研究所 === 83 === A PSA photometric ellipsometer is introduced to measure the ellipsometric parameters psi and delta of a sample. If the field of the parallel(p) and perpendicular(s) to the plane of incident are equal, the change of t...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1995
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Online Access: | http://ndltd.ncl.edu.tw/handle/42199536277152284302 |