Design and Analysiis of Microelectromechanical Systems with
碩士 === 國立成功大學 === 航空太空工程學系 === 83 === Microelectromechanical system is a new research area from the recent development in micromachining technology. The manufa- cturing process of silicon microsensor devices and semiconductor devices are so...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1995
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| Online Access: | http://ndltd.ncl.edu.tw/handle/66144448067448219412 |