Characterization of Cu and TiN films deposited by radio frequency sputtering and interdiffusion and reactions of the Cu/TiN/Si(100) thin film structure
碩士 === 國立台灣工業技術學院 === 化學工程技術研究所 === 82 ===
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1994
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| Online Access: | http://ndltd.ncl.edu.tw/handle/82883484819050491612 |