The study and fabrication of the Lead Titanate Oxide thin film
碩士 === 國立海洋大學 === 電子工程學系 === 82 === The fabrication of the acoustic sensor, not only include design and etch of samples, but research the quality of PbTiO3 thin film and compare the sensibility of film in different ar- ea size.Sputtering th...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1994
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Online Access: | http://ndltd.ncl.edu.tw/handle/44550591309615090812 |