Fabrication and characterization of silicon pressure sensors
碩士 === 國立海洋大學 === 電子工程學系 === 82 === The objects of this paper focus on the fabrication and characterization of high sensitive silicon pressure sensors for measurement of gas pressure. Although the mechanic type pressure sensors hav...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1994
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78681077359392421581 |