The Study of Compound Semiconductor Materials Grown by Using Organic-arsine and Organic-phosphine Sources
碩士 === 國立成功大學 === 電機工程研究所 === 82 === In this thesis, I use the home-made MOCVD system and use tertiarybutylarsine (TBA), tertiarybutylphosphine (TBP) as the V source to grow the semiconductor materials including GaAs, InP and InGaAs. TBA an...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1994
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| Online Access: | http://ndltd.ncl.edu.tw/handle/06015545719100784500 |