The Study of Magnetic Properties of Fe-C-X(X=Sb,Ti,V) Thin Films
碩士 === 國立成功大學 === 材料科學(工程)研究所 === 82 === A planar magnetron sputtering system with cathode and anode cooled by water was established.Under 1700V and 50 mtorr argon working pressure ,high carbon contented Fe-C (C:50.1-75.5at%) and Fe-C-X(X=S...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1994
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78625021643501720102 |