Study of Beamline Optics for Synchrotron-Based X-ray Lithography
碩士 === 國立臺灣科技大學 === 工程技術研究所 === 81 === The successful application of synchrotron radiation for microlithography requires an efficient beamline as the transport system which connects the electron storage ring to the lithographic exposure sta...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1993
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95304386646983879221 |