Study of the retrograde-well CMOS Using High-energy Ion Implantation

碩士 === 國立交通大學 === 電子研究所 === 81 === The retrograde-well process using high energy ion implantation for CMOS technology has been proposed to instead of the conventional diffusion well. The high-energy ion implantation technology eliminates th...

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Bibliographic Details
Main Authors: Yaw-Kuang Wu, 吳燿光
Other Authors: Kow-Ming Chang, Sun-Chieh Chien
Format: Others
Language:en_US
Published: 1993
Online Access:http://ndltd.ncl.edu.tw/handle/07690603680059596740