Study on Resistivity of Polysilicon Resistors Structure
碩士 === 國立交通大學 === 電子研究所 === 81 === With regard to single crystalline silicon, the resistivity is independent of geometry, while that of polycrystalline sil- icon thin film depends on the film thickness. The effects of film thickness on th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1993
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| Online Access: | http://ndltd.ncl.edu.tw/handle/48611133358757232688 |