Study on Resistivity of Polysilicon Resistors Structure

碩士 === 國立交通大學 === 電子研究所 === 81 === With regard to single crystalline silicon, the resistivity is independent of geometry, while that of polycrystalline sil- icon thin film depends on the film thickness. The effects of film thickness on th...

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Bibliographic Details
Main Authors: Yi-Huang Wu, 吳怡璜
Other Authors: Chung-Len Lee; Tan-Fu Lei
Format: Others
Language:en_US
Published: 1993
Online Access:http://ndltd.ncl.edu.tw/handle/48611133358757232688