Optical Characterization of Polycrystalline Diamond Film Deposition Using CH4-CO2 Gas Mixture
碩士 === 國立交通大學 === 材料科學(工程)研究所 === 81 === Diamond films were grown on Si(100) subatrate by microwave by microwave plasma-assisted chemical vapor deposition using CH4+ CO2 as a reactive gas.The prime purpose of this thesis was to discuss the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1993
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| Online Access: | http://ndltd.ncl.edu.tw/handle/51256387017067652349 |