Synthesis of titanium oxide film by plasma chemical vapor deposition of titanium tetrachloride

碩士 === 大同大學 === 材料科學工程研究所 === 78 ===

Bibliographic Details
Main Authors: Xu, Shao-Da, 許紹達
Other Authors: Chen, Ke-Shao
Format: Others
Language:zh-TW
Published: 1990
Online Access:http://ndltd.ncl.edu.tw/handle/52305229713581971716