Synthesis of titanium oxide film by plasma chemical vapor deposition of titanium tetrachloride
碩士 === 大同大學 === 材料科學工程研究所 === 78 ===
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1990
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Online Access: | http://ndltd.ncl.edu.tw/handle/52305229713581971716 |