Shallow junction formation using implantation of BF2 ions through poly-Si film

Shallow junction formation using implantation of BF2 ions through poly-Si film

碩士 === 國立交通大學 === 電子研究所 === 78 ===

Bibliographic Details
Main Authors:	ZHAN,SHANG-TANG, 詹尚堂
Other Authors:	ZHENG,HUANG-ZHONG
Format:	Others
Language:	zh-TW
Published:	1991
Online Access:	http://ndltd.ncl.edu.tw/handle/22782544989860662694

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