Shallow junction formation using implantation of BF2 ions through poly-Si film
碩士 === 國立交通大學 === 電子研究所 === 78 ===
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1991
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| Online Access: | http://ndltd.ncl.edu.tw/handle/22782544989860662694 |