Shallow junction formation using implantation of BF2 ions through poly-Si film

碩士 === 國立交通大學 === 電子研究所 === 78 ===

Bibliographic Details
Main Authors:	ZHAN,SHANG-TANG, 詹尚堂
Other Authors:	ZHENG,HUANG-ZHONG
Format:	Others
Language:	zh-TW
Published:	1991
Online Access:	http://ndltd.ncl.edu.tw/handle/22782544989860662694

id	ndltd-TW-078NCTU2430132
record_format	oai_dc
spelling	ndltd-TW-078NCTU24301322015-10-13T15:21:05Z http://ndltd.ncl.edu.tw/handle/22782544989860662694 Shallow junction formation using implantation of BF2 ions through poly-Si film 藉二氟化硼離子佈植於複晶矽中以形成淺接面 ZHAN,SHANG-TANG 詹尚堂碩士國立交通大學電子研究所 78 ZHENG,HUANG-ZHONG 鄭晃忠 1991 學位論文 ; thesis 24 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立交通大學 === 電子研究所 === 78 ===
author2	ZHENG,HUANG-ZHONG
author_facet	ZHENG,HUANG-ZHONG ZHAN,SHANG-TANG 詹尚堂
author	ZHAN,SHANG-TANG 詹尚堂
spellingShingle	ZHAN,SHANG-TANG 詹尚堂 Shallow junction formation using implantation of BF2 ions through poly-Si film
author_sort	ZHAN,SHANG-TANG
title	Shallow junction formation using implantation of BF2 ions through poly-Si film
title_short	Shallow junction formation using implantation of BF2 ions through poly-Si film
title_full	Shallow junction formation using implantation of BF2 ions through poly-Si film
title_fullStr	Shallow junction formation using implantation of BF2 ions through poly-Si film
title_full_unstemmed	Shallow junction formation using implantation of BF2 ions through poly-Si film
title_sort	shallow junction formation using implantation of bf2 ions through poly-si film
publishDate	1991
url	http://ndltd.ncl.edu.tw/handle/22782544989860662694
work_keys_str_mv	AT zhanshangtang shallowjunctionformationusingimplantationofbf2ionsthroughpolysifilm AT zhānshàngtáng shallowjunctionformationusingimplantationofbf2ionsthroughpolysifilm AT zhanshangtang jíèrfúhuàpénglízibùzhíyúfùjīngxìzhōngyǐxíngchéngqiǎnjiēmiàn AT zhānshàngtáng jíèrfúhuàpénglízibùzhíyúfùjīngxìzhōngyǐxíngchéngqiǎnjiēmiàn
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Shallow junction formation using implantation of BF2 ions through poly-Si film

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