Diffractive Optics Near-field Laser Lithography for Fabrication of 3-dimensional Periodic Nanostructures

Diffractive Optics Near-field Laser Lithography for Fabrication of 3-dimensional Periodic Nanostructures

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The main objective of the present research work is to fabricate three dimensional photonic nanostructures in photo-sensitive polymers using a novel diffractive optical element (DOE) based lithography technique. A diffractive optical element is a promising alternative device for 3D fabrication where...

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Bibliographic Details
Main Author: Chanda, Debashis
Other Authors: Herman, Peter R.
Language:en_ca
Published: 2009
Subjects:
Electronics and Electrical
Nano-fabrication
Laser fabrication
Photonic crystal
Laser material processing
Diffractive optical element
Optics
Photonics
0544
Online Access:http://hdl.handle.net/1807/17739

Internet

http://hdl.handle.net/1807/17739

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