Ion beam synthesis of silicon-carbon structures and related materials
The goal of this dissertation is the study and characterisation of high dose Carbon (C) implantation processes into Silicon (Si) and related materials for the synthesis of Silicon Carbide (SiC). The attainment of well-characterised multilayer structures useful to fabricate sensor and electronic devi...
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| Format: | Doctoral Thesis |
| Language: | English |
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Universitat de Barcelona
1999
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| Online Access: | http://hdl.handle.net/10803/1514 http://nbn-resolving.de/urn:isbn:9788469251775 |