Role of atomic nitrogen during GaN growth by plasma-assisted molecular beam epitaxy revealed by appearance mass spectrometry

Bibliographic Details
Main Authors:	Osaka, J., Kumar, Senthil M., Toyoda, H., Ishijima, T., Sugai, H., Mizutani, T.
Language:	en
Published:	American Institute of Physics 2007
Online Access:	http://dx.doi.org/10.1063/1.2734390 http://hdl.handle.net/2237/8775

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spelling	ndltd-NAGOYA-oai-ir.nul.nagoya-u.ac.jp-2237-87752013-01-07T23:44:01ZRole of atomic nitrogen during GaN growth by plasma-assisted molecular beam epitaxy revealed by appearance mass spectrometryOsaka, J.Kumar, Senthil M.Toyoda, H.Ishijima, T.Sugai, H.Mizutani, T.American Institute of Physics2007-04-23Article(publisher)http://dx.doi.org/10.1063/1.2734390http://hdl.handle.net/2237/87750003-6951APPLIED PHYSICS LETTERS. v.90, n.17, 2007, p.172114-1 - 172114-3enCopyright (2007) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
collection	NDLTD
language	en
sources	NDLTD
author	Osaka, J. Kumar, Senthil M. Toyoda, H. Ishijima, T. Sugai, H. Mizutani, T.
spellingShingle	Osaka, J. Kumar, Senthil M. Toyoda, H. Ishijima, T. Sugai, H. Mizutani, T. Role of atomic nitrogen during GaN growth by plasma-assisted molecular beam epitaxy revealed by appearance mass spectrometry
author_facet	Osaka, J. Kumar, Senthil M. Toyoda, H. Ishijima, T. Sugai, H. Mizutani, T.
author_sort	Osaka, J.
title	Role of atomic nitrogen during GaN growth by plasma-assisted molecular beam epitaxy revealed by appearance mass spectrometry
title_short	Role of atomic nitrogen during GaN growth by plasma-assisted molecular beam epitaxy revealed by appearance mass spectrometry
title_full	Role of atomic nitrogen during GaN growth by plasma-assisted molecular beam epitaxy revealed by appearance mass spectrometry
title_fullStr	Role of atomic nitrogen during GaN growth by plasma-assisted molecular beam epitaxy revealed by appearance mass spectrometry
title_full_unstemmed	Role of atomic nitrogen during GaN growth by plasma-assisted molecular beam epitaxy revealed by appearance mass spectrometry
title_sort	role of atomic nitrogen during gan growth by plasma-assisted molecular beam epitaxy revealed by appearance mass spectrometry
publisher	American Institute of Physics
publishDate	2007
url	http://dx.doi.org/10.1063/1.2734390 http://hdl.handle.net/2237/8775
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Role of atomic nitrogen during GaN growth by plasma-assisted molecular beam epitaxy revealed by appearance mass spectrometry

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