Role of atomic nitrogen during GaN growth by plasma-assisted molecular beam epitaxy revealed by appearance mass spectrometry
| Main Authors: | , , , , , |
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| Language: | en |
| Published: |
American Institute of Physics
2007
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| Online Access: | http://dx.doi.org/10.1063/1.2734390 http://hdl.handle.net/2237/8775 |