Formation and micromachining of Teflon (fluorocarbon polymer) film by a completely dry process using synchrotron radiation
| Main Authors: | , , , , |
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| Language: | en |
| Published: |
American Institute of Physics
1999
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| Online Access: | http://dx.doi.org/10.1116/1.590675 http://hdl.handle.net/2237/7078 |