Dynamics of E-H mode transition in high-pressure RF inductively coupled plasmas

Dynamics of E-H mode transition in high-pressure RF inductively coupled plasmas

Bibliographic Details
Main Authors: Razzak, M. Abdur, Takamura, Shuichi, Uesugi, Yoshihiko
Language:en
Published: IEEE 2005
Subjects:
E-H mode transition dynamics
high-speed imaging
inductively coupled plasma
Online Access:http://hdl.handle.net/2237/6794
http://dx.doi.org/10.1109/TPS.2005.845019

Internet

http://hdl.handle.net/2237/6794
http://dx.doi.org/10.1109/TPS.2005.845019

Similar Items