Studies on the Development and Application of Permanent Magnet Electron Cyclotron Resonance Plasma Sources

Studies on the Development and Application of Permanent Magnet Electron Cyclotron Resonance Plasma Sources

名古屋大学博士学位論文学位の種類:博士(工学) (課程) 学位授与年月日:平成10年3月25日

Bibliographic Details
Main Authors:	田, 昭治, Den, Shoji
Language:	en
Published:	1998
Online Access:	http://hdl.handle.net/2237/15739

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