Novel etch-stop materials for silicon micromachining

Novel etch-stop materials for silicon micromachining

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1997. === Includes bibliographical references (p. 62-64). === by Kenneth Chu-Chao Wu. === S.M.

Bibliographic Details
Main Author: Wu, Kenneth Chu-Chao
Other Authors: Eugene A. Fitzgerald.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2005
Subjects:
Materials Science and Engineering
Online Access:http://hdl.handle.net/1721.1/9868

Internet

http://hdl.handle.net/1721.1/9868

Similar Items