Reactive DC magnetron sputtering of ultrathin superconducting niobium nitride films
Thesis: S.M. in Electrical Engineering, Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2015. === This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections. === C...
Main Author: | Dane, Andrew E. (Andrew Edward) |
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Other Authors: | Karl K. Berggren. |
Format: | Others |
Language: | English |
Published: |
Massachusetts Institute of Technology
2015
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Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/97257 |
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