Reactive DC magnetron sputtering of ultrathin superconducting niobium nitride films

Thesis: S.M. in Electrical Engineering, Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2015. === This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections. === C...

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Bibliographic Details
Main Author: Dane, Andrew E. (Andrew Edward)
Other Authors: Karl K. Berggren.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2015
Subjects:
Online Access:http://hdl.handle.net/1721.1/97257