Analysis and reduction of variability in scanning electron microscopy measurements of critical dimensions
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering; and, (S.M.)--Massachusetts Institute of Technology, Sloan School of Management, 1998. === Includes bibliographical references (p. 79). === This thesis describes work done during a Leaders for Manufactur...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/9579 |