Electrical studies of silicon and low K dielectric material
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1999. === Includes bibliographical references (leaves 108-111). === Junction capacitance measurement is a well-established powerful characterization technique that allows one to explore electrical and...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/9130 |