MEMS structures for stress measurements for thin films deposited using CVD
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2001. === Includes bibliographical references (p. 76-79). === Mechanical stress in thin films is an important reliability issue in microelectronic devices and systems. The presence of large stresses can...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/9041 |