Design and fabrication of a high precision wafer polishing machine
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2000. === Includes bibliographical references (leaf 142). === The objective of this project is to design and fabricate a full-scale Chemical- Mechanical Polishing machine, whose performance is much higher than tha...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/9015 |