Enabling integration of vapor-deposited polymer thin films
Thesis: Ph. D., Massachusetts Institute of Technology, Department of Chemical Engineering, 2014. === Cataloged from PDF version of thesis. === Includes bibliographical references. === Initiated Chemical Vapor Deposition (iCVD) is a versatile, one-step process for synthesizing conformal and functiona...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2014
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| Online Access: | http://hdl.handle.net/1721.1/89947 |