Image grating metrology using a Fresnel zone plate

Image grating metrology using a Fresnel zone plate

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003. === Includes bibliographical references (p. 107-110). === by Chulmin Joo. === S.M.

Bibliographic Details
Main Author: Joo, Chulmin, 1976-
Other Authors: Mark L. Schattenburg and George Barbastathis.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2014
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/89392

Internet

http://hdl.handle.net/1721.1/89392

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