A MEMS valve for the MIT Microengine
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2001. === Includes bibliographical references (p. 95-96). === A microfabricated, electro-statically actuated, on/off gas valve made of silicon material has been designed, fabricated and tested. The valve will be a...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/8548 |