Dielectric sensing of silicon accelerometers
Thesis: M. Eng., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2013. === Cataloged from PDF version of thesis. === Includes bibliographical references (pages 107-108). === Microaccelerometers have established themselves as a vital piece of the glob...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2014
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| Online Access: | http://hdl.handle.net/1721.1/85433 |