Characterization of ionic liquid ion sources for focused ion beam applications
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Aeronautics and Astronautics, 2013. === This thesis was scanned as part of an electronic thesis pilot project. === Cataloged from PDF version of thesis. === Includes bibliographical references (p. 79-82). === In the Focused Ion Beam (FIB...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | English |
| Published: |
Massachusetts Institute of Technology
2013
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/82506 |