A high precision three degrees of freedom friction drive stage
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1999. === Includes bibliographical references (leaves 52-53). === by Woo Sok Chang. === S.M.
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | English |
| Published: |
Massachusetts Institute of Technology
2013
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/80626 |