The interaction of xenon difluoride with Si(100)

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemistry, 2002. === Also issued in leaves. Vita. === Includes bibliographical references. === The interaction of low energy XeF2 with Si(100)2x1 has been investigated by studying both the surface-bound and gas-phase products of the re...

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Bibliographic Details
Main Author: Holt, Judson Robert, 1974-
Other Authors: Sylvia T. Ceyer.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2005
Subjects:
Online Access:http://hdl.handle.net/1721.1/8052