Design and modeling of a PZT thin film based piezoelectric micromachined ultrasonic transducer (PMUT)
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2012. === Cataloged from PDF version of thesis. === Includes bibliographical references (p. 149-156). === The design and modelling framework for a piezoelectric micromachined ultrasonic transducer (PMUT) based on...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2012
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| Online Access: | http://hdl.handle.net/1721.1/74942 |