Cleanroom design
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Architecture, 1987. === Includes bibliographical references (leaves 147-150). === The development of the integrated circuit which replaced the vacuum tube, started the size reduction process for computer components. These integrated circ...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2012
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| Online Access: | http://hdl.handle.net/1721.1/73283 |