Design and testing of a microvalve capable of precisely controlling low fluidic flow rates

Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2011. === Cataloged from PDF version of thesis. === Includes bibliographical references (p. 48). === Development of the design, manufacture, and testing for a gas flow regulating microvalve is presented herein. Th...

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Bibliographic Details
Main Authors: Daniel, Cody R, Sepp, Toomas R
Other Authors: Martin L. Culpepper.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2012
Subjects:
Online Access:http://hdl.handle.net/1721.1/70428