A study of through-silicon-via (TSV) induced transistor variation

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2011. === Cataloged from PDF version of thesis. === Includes bibliographical references (p. 83-85). === As continued scaling becomes increasingly difficult, 3D integration has emerged as a via...

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Bibliographic Details
Main Author: Yu, Li, S.M. Massachusetts Institute of Technology
Other Authors: Duane S. Boning.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2011
Subjects:
Online Access:http://hdl.handle.net/1721.1/66483