Drift correction for scanning-electron microscopy

Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2010. === This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections. === Cataloged from student submi...

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Bibliographic Details
Main Author: Snella, Michael T
Other Authors: Karl K. Berggren and Vivek K Goyal.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2011
Subjects:
Online Access:http://hdl.handle.net/1721.1/62605