Gate-all-around silicon nanowire MOSFETs : top-down fabrication and transport enhancement techniques
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2010. === This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections. === Cataloged from PDF version of...
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Language: | English |
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Massachusetts Institute of Technology
2011
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Online Access: | http://hdl.handle.net/1721.1/62313 |