RF MEMS switches : survey and analysis

Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2009. === Includes bibliographical references (p. 95-97). === Microelectromechanical systems known as MEMS, are an enabling technology that describe a field capable of creating very small e...

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Bibliographic Details
Main Author: Machal-Cajigas, Antoinne Y
Other Authors: Jeffrey H. Lang and Bryan Johnson.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2010
Subjects:
Online Access:http://hdl.handle.net/1721.1/53152