The analysis and design of integrated capacitive displacement sensors

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. === Includes bibliographical references (leaves 98-104). === by SaiBun Wong. === M.S.

Bibliographic Details
Main Author: Wong, SaiBun, 1976-
Other Authors: David L. Trumper and Charles G. Sodini.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2009
Subjects:
Online Access:http://hdl.handle.net/1721.1/50034