Non-perfluorocompound chemistries for dielectric etching applications

Non-perfluorocompound chemistries for dielectric etching applications

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. === Includes bibliographical references (p. 99-101). === by Laura C. Pruette. === M.S.

Bibliographic Details
Main Author:	Pruette, Laura C. (Laura Catherine), 1974-
Other Authors:	Rafael Reif.
Format:	Others
Language:	English
Published:	Massachusetts Institute of Technology 2009
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/50031

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