Non-perfluorocompound chemistries for dielectric etching applications
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. === Includes bibliographical references (p. 99-101). === by Laura C. Pruette. === M.S.
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Format: | Others |
Language: | English |
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Massachusetts Institute of Technology
2009
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Online Access: | http://hdl.handle.net/1721.1/50031 |