Ion beam enhanced grain growth in thin films

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1987. === Bibliography: leaves 213-224. === by Harry Albert Atwater, Jr. === Ph.D.

Bibliographic Details
Main Author: Atwater, Harry A. (Harry Albert), 1960-
Other Authors: Henry I. Smith, Carl V. Thompson.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2009
Subjects:
Online Access:http://hdl.handle.net/1721.1/49890